By Christian C Enz, Andreas Kaiser
MEMS-based Circuits and structures for instant Communication offers complete assurance of RF-MEMS know-how from gadget to method point. This edited quantity locations emphasis on how process functionality for radio frequency functions will be leveraged via Micro-Electro-Mechanical platforms (MEMS). assurance additionally extends to leading edge MEMS-aware radio architectures that push the potential for MEMS know-how additional forward.
This paintings provides a extensive review of the know-how from MEMS units (mainly BAW and Si MEMS resonators) to simple circuits, akin to oscillators and filters, and at last whole structures similar to ultra-low-power MEMS-based radios. Contributions from prime specialists all over the world are equipped in 3 components. half I introduces RF-MEMS expertise, units and modeling and contains a potential outlook on ongoing advancements in the direction of Nano-Electro-Mechanical structures (NEMS) and phononic crystals. machine homes and types are offered in a circuit orientated standpoint. half II focusses on layout of digital circuits incorporating MEMS. Circuit layout innovations particular to MEMS resonators are utilized to oscillators and lively filters. partially III members talk about how MEMS can advantageously be utilized in radios to extend their miniaturization and decrease their strength intake. RF platforms outfitted round MEMS parts equivalent to MEMS-based frequency synthesis together with all-digital PLLs, ultra-low strength MEMS-based communique platforms and a MEMS-based car instant sensor node are defined.
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Extra resources for MEMS-based circuits and systems for wireless communication
7). The two-port configuration can be realized by placing the two transducers adjacent to each others in the lateral direction (Fig. 7a) or by stacking the transducers on top of one another (Fig. 7b). The second implementation is more effective from the perspective of maximizing the device electromechanical coupling coefficient per unit area. In fact, the device motional resistance matches the one of a oneport device for a given layout area and improves the mechanical coupling into the fundamental mode by effectively driving the device over the entire top surface.
The primary source of power consumption in the oscillator is due to the motional resistance, RM , of the resonator. As already stated, RM is inversely proportional to kt2 · Q, a figure of merit of the resonator. 12b shows the dependence of gmc on the resonator geometry. Since the sub-resonator width, W , is used to define the resonant frequency in the piezoelectric AlN CMR technology, only the effective length, nL, and thickness, T , are available for design optimization. RM is inversely proportional to nL, and this explains why the value of gmc increases with a decrease in nL.
The unterminated response highlights the two peaks formed by the coupled system of oscillators. c 2006 IEEE. 20), although, depending on the strength of the mechanical coupling, it can be limited by the mechanical current induced by the out-ofresonance displacement of the coupled resonator system. The typical response of a second-order mechanically coupled filter formed by AlN CMR width-extensional devices is shown in Fig. 5 dB at 40 MHz have been attained. 4 Applications for Aluminum Nitride Contour-Mode MEMS Resonator Technology A unique advantage of the AlN CMR technology over other resonant devices is the ability to provide for multiple frequencies of operation on the same silicon chip.